不同的样品适合不同的制备方法，不存在所谓的万能方案可以制备所有的样品。下表列出了一些常用的制样参考方案。
机械抛光 |
|||||
制备方式 |
标准金相抛光 |
硅溶胶 |
振动抛光 |
电解抛光（机械抛光后处理方案） |
离子研磨（机械抛光后处理优选方案） |
金属 | |||||
单相 |
✔ |
✔ |
可选 |
✔ |
✔ |
Multi phase |
✔ |
✔ |
多相 |
不推荐，可能产生选择性腐蚀 |
✔ |
软基金属 Cu, Al |
✔ |
✔ |
推荐 |
推荐 |
✔ |
钢 |
✔ |
✔ |
可选 |
✔ |
✔ |
陶瓷 | |||||
单相 |
✔ |
✔ |
推荐 |
不推荐 |
✔ |
多相 |
✔ |
✔ |
推荐 |
不推荐 |
✔ |
地质 | |||||
多相 |
✔ |
✔ |
推荐 |
不推荐 |
✔ |
*离子研磨一般在机械研磨后进行，虽然这种方法可以直接应用在初始制样上，但是这样会需要更长的制备时间。
This application note describes a method of combining Oxford Instrument’s OmniProbe tools and AZtec EBSD system for the manipulation and analysis of a 5μm diameter gold microelectronic wire sample.
This application note describes how EBSD patterns evolve during various mechanical polishing stages of duplex steel and sintered alumina as well as electrolytical polishing of the duplex steel sample.
This technical bulletin describes some simple recipes outlining the techniques sample preparation for EBSD Analysis.
This poster shows how Broad Beam Ion Milling has been used to produce excellent samples from zirconium and magnesium alloys and galvanized zinc coatings, usually difficult to prepare by mechanical routes only.
This study is an attempt to illustrate how EBSD patterns evolve through the various metallographic preparation steps using duplex steel and alumina samples as examples.
This study illustrates the methodology for
mechanically polishing an automotive spark plug, utilising both bright field and differential interference contrast optical microscopy to assess the surface condition, prior to SEM/EBSD characterisation.
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